オノダ　ジョウ   小野田　穣    所属   福岡教育大学  教育学部 理科教育研究ユニット    職種   講師
言語種別	英語
発行・発表の年月	2020/10
形態種別	研究論文
査読	査読あり
標題	Consistent probe spacing in multiple-probe STM experiments
執筆形態	共著
掲載誌名	AIP Advances
掲載区分	国外
出版社・発行元	American Institute of Physics
巻・号・頁	10,pp.105213
総ページ数	5
担当区分	筆頭著者
著者・共著者	Jo Onoda, Doug Vick, Mark Salomons, Robert Wolkow and Jason Pitters
概要	Multi-probe scanning tunneling microscopy can play a role in various electrical measurements and characterization of nanoscale objects. The consistent close placement of multiple probes relies on very sharp apexes with no other interfering materials along the shank of the tip. Electrochemically etched tips can prepare very sharp apex tips; however, other asperities on the shank can cause interference and limit the close positioning of multiple tips to beyond the measured radii. Gallium focused ion beam (FIB) milling is used to remove any interfering material and allow closely spaced tips with a consistent yield. The tip apex radius is evaluated with field ion microscopy, and the probe spacing is evaluated with STM on hydrogen terminated silicon surfaces. FIB prepared tips can consistently achieve the measured probe to probe spacing distances of 25 nm–50 nm.
DOI	10.1063/5.0021739